2H-SiC films grown by laser chemical vapor deposition
نویسندگان
چکیده
منابع مشابه
SiC coatings grown by liquid injection chemical vapor deposition using single source metal-organic precursors
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We demonstrate the growth of high quality graphene layers by chemical vapor deposition (CVD) on insulating and conductive SiC substrates. This method provides key advantages over the well-developed epitaxial graphene growth by Si sublimation that has been known for decades. (1) CVD growth is much less sensitive to SiC surface defects resulting in high electron mobilities of ∼1800 cm(2)/(V s) an...
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................................................................................................. iii Sammanfattning ..................................................................................... iv Acknowledgement ................................................................................... v List of included publications ..............................................................
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ژورنال
عنوان ژورنال: Journal of the European Ceramic Society
سال: 2015
ISSN: 0955-2219
DOI: 10.1016/j.jeurceramsoc.2015.08.028